Fabrication of 3D microstructures using grayscale lithography
Author: | Frederico Lima, Isman M. KhaziORCiDGND, Ulrich MeschederORCiDGND, Alok C. Tungal, Uma Muthiah |
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DOI: | https://doi.org/10.1515/aot-2019-0023 |
ISSN: | 2192-8584 |
Parent Title (English): | Advanced Optical Technologies |
Document Type: | Article (peer-reviewed) |
Language: | English |
Year of Completion: | 2019 |
Release Date: | 2019/06/21 |
Tag: | 3D structuring; Grayscale lithography; Grayscale technology; Laser direct writing; Microelectroplating; Photoresist mold; Reactive ion etching |
Volume: | 8.2019 |
Issue: | 3-4 |
First Page: | 181 |
Last Page: | 193 |
Licence (German): | Urheberrechtlich geschützt |