Investigation of material removal mechanisms of laser-structured Si3N4 via single diamond grit scratching
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| Document Type: | Article (peer-reviewed) |
|---|---|
| Author: | Masih Paknejad, Bahman AzarhoushangORCiDGND, Ali ZahediORCiDGND, Mehdi Khakrangin, Mohammadali Kadivar |
| URN: | https://urn:nbn:de:bsz:fn1-opus4-93767 |
| DOI: | https://doi.org/10.1007/s00170-022-10793-0 |
| ISSN: | 1433-3015 |
| Parent Title (English): | The International Journal of Advanced Manufacturing Technology |
| Language: | English |
| Year of Completion: | 2023 |
| Release Date: | 2023/04/17 |
| Tag: | Laser structuring; Material removal mechanism; Silicon nitride; Single diamond grit scratching; Specific cutting energy; Ultrashort-pulse laser |
| Volume: | 125.2023 |
| Issue: | 5-6 |
| First Page: | 2759 |
| Last Page: | 2775 |
| Open-Access-Status: | Open Access |
| Hybrid | |
| Licence (German): |  Creative Commons - CC BY - Namensnennung 4.0 International |