Area Selectiv Atomic Layer Deposition on Noble Metals
| Author: | Nicolai Simon, Aaron Urschel, Thomas Stieglitz, Volker BucherORCiDGND |
|---|---|
| DOI: | https://doi.org/10.1515/bmt-2022-2001 |
| Parent Title (English): | BMT 2022, Abstracts of the 2022 Joint Annual Conference of the Austrian (ÖGBMT), German (VDE DGBMT) and Swiss (SSBE) Societies for Biomedical Engineering, 28.-30.09.2022, Innsbruck, Österreich |
| Document Type: | Conference Proceeding |
| Language: | English |
| Year of Completion: | 2022 |
| Release Date: | 2022/10/04 |
| First Page: | 471 |
| Open-Access-Status: | Open Access |
| Licence (German): |  Creative Commons - CC BY - Namensnennung 4.0 International |