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Laser ablation mechanism of silicon nitride with nanosecond and picosecond lasers

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Metadaten
Author:Babak Soltani, Bahman AzarhoushangORCiDGND, Ali ZahediORCiD
DOI:https://doi.org/10.1016/j.optlastec.2019.105644
ISSN:0030-3992
Parent Title (English):Optics & Laser Technology
Document Type:Article (peer-reviewed)
Language:English
Year of Completion:2019
Release Date:2022/03/28
Tag:Laser input energy density; Laser-material interaction; Nanosecond laser; Picosecond laser; Silicon nitride
Volume:119.2019
Issue:November
Article Number:105644
Licence (German):License LogoUrheberrechtlich gesch├╝tzt