Laser ablation mechanism of silicon nitride with nanosecond and picosecond lasers
| Author: | Babak Soltani, Bahman AzarhoushangORCiDGND, Ali ZahediORCiDGND |
|---|---|
| DOI: | https://doi.org/10.1016/j.optlastec.2019.105644 |
| ISSN: | 0030-3992 |
| Parent Title (English): | Optics & Laser Technology |
| Document Type: | Article (peer-reviewed) |
| Language: | English |
| Year of Completion: | 2019 |
| Release Date: | 2022/03/28 |
| Tag: | Laser input energy density; Laser-material interaction; Nanosecond laser; Picosecond laser; Silicon nitride |
| Volume: | 119.2019 |
| Issue: | November |
| Article Number: | 105644 |
| Licence (German): |  Urheberrechtlich geschützt |