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Simulation of the laser-material interaction of ultrashort pulse laser processing of silicon nitride workpieces and the key factors in the ablation process

Metadaten
Author:Babak Soltani, Faramarz Hojati, Amir DaneshiGND, Bahman AzarhoushangORCiDGND
URN:urn:nbn:de:bsz:fn1-opus4-77825
DOI:https://doi.org/10.1007/s00170-021-07111-5
ISSN:1433-3015
Parent Title (English):The International Journal of Advanced Manufacturing Technology
Document Type:Article (peer-reviewed)
Language:English
Year of Completion:2021
Release Date:2021/12/09
Tag:Laser ablation; Laser power intensity; Multiphoton ionisation; Silicon nitride; Ultrashort pulse laser
Volume:114.2021
Issue:11
First Page:3719
Last Page:3738
Open Access :Frei verf├╝gbar
Licence (German):License LogoCreative Commons - CC BY - Namensnennung 4.0 International