Simulation of the laser-material interaction of ultrashort pulse laser processing of silicon nitride workpieces and the key factors in the ablation process
Author: | Babak Soltani, Faramarz Hojati, Amir DaneshiGND, Bahman AzarhoushangORCiDGND |
---|---|
URN: | https://urn:nbn:de:bsz:fn1-opus4-77825 |
DOI: | https://doi.org/10.1007/s00170-021-07111-5 |
ISSN: | 1433-3015 |
Parent Title (English): | The International Journal of Advanced Manufacturing Technology |
Document Type: | Article (peer-reviewed) |
Language: | English |
Year of Completion: | 2021 |
Release Date: | 2021/12/09 |
Tag: | Laser ablation; Laser power intensity; Multiphoton ionisation; Silicon nitride; Ultrashort pulse laser |
Volume: | 114.2021 |
Issue: | 11 |
First Page: | 3719 |
Last Page: | 3738 |
Open-Access-Status: | Open Access |
Licence (German): | ![]() |