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Evaluation and Optimization of a MOEMS Active Focusing Device

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Metadaten
Author:Ulrich MeschederORCiDGND, Michael Lootze, Khaled Aljasem
DOI:https://doi.org/10.3390/mi12020172
ISSN:2072-666X
Parent Title (English):Micromachines
Document Type:Article (peer-reviewed)
Language:English
Year of Completion:2021
Release Date:2021/04/07
Tag:Active focusing; Adaptive optics; Electrostatic actuation; MOEMS; SOI
Volume:12.2021
Issue:2 Artikel 172
Page Number:22
Open Access :Frei verf├╝gbar
Licence (German):License LogoCreative Commons - CC BY - Namensnennung 4.0 International