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Investigation of Long-Term Stability of Hybrid Systems-in-Foil (HySiF) for Biomedical Applications

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Metadaten
Author:Ulrike Passlack, Nicolai Simon, Volker BucherORCiDGND, Christine Harendt, Thomas Stieglitz, Joachim N. Burghartz
DOI:https://doi.org/10.1109/ESTC48849.2020.9229795
ISBN:978-1-7281-6293-5
Parent Title (English):2020 IEEE 8th Electronics System-Integration Technology Conference (ESTC), 15-18 September 2020, Tonsberg, Vestfold Norway
Document Type:Conference Proceeding
Language:English
Year of Completion:2020
Release Date:2020/12/07
Tag:Atomic layer deposition; Polyimides; Silicon; Substrates; Surface treatment
Pagenumber:6
Open Access:Innerhalb der Hochschule
Licence (German):License LogoEs gilt das UrhG