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Passivated electrode side walls by atomic layer deposition on flexible polyimide based samples

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Author:Markus Westerhausen, Tanja Martin, Michael Metzger, Felix BlendingerORCiD, Monika Fleischer, Boris Hofmann, Volker BucherORCiDGND
DOI:https://doi.org/10.1016/j.mee.2020.111315
ISSN:0167-9317
Parent Title (English):Microelectronic Engineering
Document Type:Article (peer-reviewed)
Language:English
Year of Completion:2020
Release Date:2020/04/17
Tag:Atomic layer deposition (ALD); Flexible microelectrode arrays (Flex-MEAs); Passivation; Polyimide
Volume:227.2020
Issue:April Artikel 111315
Licence (German):License LogoEs gilt das UrhG