Silicon Needle-like Surfaces for Room Temperature Silicon-Silicon Bonding Applications

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Metadaten
Author:Shervin KeshavarziORCiD
URN:urn:nbn:de:bsz:25-freidok-1515955
Referee:Holger Reinecke, Ulrich Mescheder
Document Type:Doctoral Thesis
Language:English
Year of Completion:2019
EnrichmentHochschule:Albert-Ludwigs-Universit├Ąt
City of event:Freiburg
Date of final exam:2019/12/05
Release Date:2019/12/20
Pagenumber:220
Licence (German):License LogoEs gilt das UrhG