Simulation of laser ablation mechanism of silicon nitride by ultrashort pulse laser
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| Author: | Babak Soltani, Faramarz Hojati, Amir DaneshiGND, Bahman AzarhoushangORCiDGND |
|---|---|
| URN: | https://urn:nbn:de:bsz:fn1-opus4-59166 |
| DOI: | https://doi.org/10.1016/j.procir.2019.04.060 |
| ISSN: | 2212-8271 |
| Parent Title (English): | Procedia CIRP |
| Document Type: | Article (peer-reviewed) |
| Language: | English |
| Year of Completion: | 2019 |
| Release Date: | 2019/11/27 |
| Tag: | Silicon nitride; Simulation; Ultrashort pulse laser |
| Volume: | 82.2019 |
| First Page: | 208 |
| Last Page: | 213 |
| Open-Access-Status: | Open Access |
| Licence (German): |  Creative Commons - CC BY-NC-ND - Namensnennung - Nicht kommerziell - Keine Bearbeitungen 4.0 International |