Simulation of laser ablation mechanism of silicon nitride by ultrashort pulse laser

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Metadaten
Author:Babak Soltani, Faramarz Hojati, Amir Daneshi, Bahman AzarhoushangORCiDGND
DOI:https://doi.org/10.1016/j.procir.2019.04.060
ISSN:2212-8271
Parent Title (English):Procedia CIRP
Document Type:Article (peer-reviewed)
Language:English
Year of Completion:2019
Release Date:2019/11/27
Tag:Silicon nitride; Simulation; Ultrashort pulse laser
Volume:82.2019
First Page:208
Last Page:213
Open Access:Frei verf├╝gbar
Licence (German):License LogoCreative Commons - CC BY-NC-ND - Namensnennung - Nicht kommerziell - Keine Bearbeitungen 4.0 International