Simulation of laser ablation mechanism of silicon nitride by ultrashort pulse laser
Author: | Babak Soltani, Faramarz Hojati, Amir DaneshiGND, Bahman AzarhoushangORCiDGND |
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DOI: | https://doi.org/10.1016/j.procir.2019.04.060 |
ISSN: | 2212-8271 |
Parent Title (English): | Procedia CIRP |
Document Type: | Article (peer-reviewed) |
Language: | English |
Year of Completion: | 2019 |
Release Date: | 2019/11/27 |
Tag: | Silicon nitride; Simulation; Ultrashort pulse laser |
Volume: | 82.2019 |
First Page: | 208 |
Last Page: | 213 |
Open Access: | Frei verfügbar |
Licence (German): | ![]() |