Laser-assisted micro-grinding of Si3N4
| Author: | Mohammadali KadivarGND, Sergey Shamray, Babak Soltani, Amir DaneshiGND, Bahman AzarhoushangORCiDGND |
|---|---|
| DOI: | https://doi.org/10.1016/j.precisioneng.2019.09.004 |
| ISSN: | 0141-6359 |
| Parent Title (English): | Precision Engineering |
| Document Type: | Article (peer-reviewed) |
| Language: | English |
| Year of Completion: | 2019 |
| Release Date: | 2019/11/27 |
| Tag: | Cutting forces; Laser-assisted micro-grinding; Micro-grinding; Silicon nitride; Surface roughness |
| Volume: | 60.2019 |
| First Page: | 394 |
| Last Page: | 404 |
| Licence (German): |  Urheberrechtlich geschützt |