Laser-assisted micro-grinding of Si3N4

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Author:Mohammadali Kadivar, Sergey Shamray, Babak Soltani, Amir Daneshi, Bahman AzarhoushangORCiDGND
DOI:https://doi.org/10.1016/j.precisioneng.2019.09.004
ISSN:0141-6359
Parent Title (English):Precision Engineering
Document Type:Article (peer-reviewed)
Language:English
Year of Completion:2019
Release Date:2019/11/27
Tag:Cutting forces; Laser-assisted micro-grinding; Micro-grinding; Silicon nitride; Surface roughness
Volume:60.2019
First Page:394
Last Page:404
Licence (German):License LogoEs gilt das UrhG