Fabrication of 3D microstructures using grayscale lithography

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Author:Frederico Lima, Isman KhaziORCiD, Ulrich MeschederORCiDGND, Alok C. Tungal, Uma Muthiah
DOI:https://doi.org/10.1515/aot-2019-0023
ISSN:2192-8584
Parent Title (English):Advanced Optical Technologies
Document Type:Article (peer-reviewed)
Language:English
Year of Completion:2019
Release Date:2019/06/21
Tag:3D structuring; Grayscale lithography; Grayscale technology; Laser direct writing; Microelectroplating; Photoresist mold; Reactive ion etching
Volume:8.2019
Issue:3-4
First Page:181
Last Page:193
Licence (German):License LogoEs gilt das UrhG