Micromechanical inclinometer

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Metadaten
Author:Ulrich MeschederORCiDGND, S. Majer
DOI:https://doi.org/10.1016/S0924-4247(97)01387-3
ISSN:0924-4247
Parent Title (English):Sensors and Actuators A: Physical
Document Type:Article (peer-reviewed)
Language:English
Year of Completion:1997
Release Date:2018/02/27
Tag:Inclinometers; Micromechanics; Piezoresistance; Silicon
Volume:60.1997
Issue:1-3
First Page:134
Last Page:138
Open Access:Innerhalb der Hochschule
Licence (German):License LogoEs gilt das UrhG