Optical monitoring and control of Si wet etching

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Author:Ulrich MeschederORCiDGND, Christiane Kötter
Parent Title (English):Eurosensors XII : proceedings of the 12th European Conference on Solid-State Transducers and the 9th UK Conference on Sensors and their Applications, Southampton, UK, 13 - 16 September 1998
Publisher:Inst. of Physics Publ.
Place of publication:Bristol
Document Type:Conference Proceeding
Year of Completion:1998
Release Date:2018/02/27
First Page:51
Last Page:54
Open Access:Frei verfügbar
Licence (German):License LogoEs gilt das UrhG