Porous silicon-based humidity sensor with interdigital electrodes and internal heaters

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Author:P. Fürjes, Andras Kovacs, Cs. Dücsö, Maria Adam, Bernhard Müller, Ulrich MeschederORCiDGND
DOI:https://doi.org/10.1016/S0925-4005(03)00423-4
ISSN:0925-4005
Parent Title (English):Sensors and Actuators B: Chemical
Document Type:Article (peer-reviewed)
Language:English
Year of Completion:2003
Release Date:2018/02/27
Tag:Effective heating; Humidity sensor; Porous silicon
Volume:95.2003
Issue:1-3
First Page:140
Last Page:144
Open Access:Innerhalb der Hochschule
Licence (German):License LogoEs gilt das UrhG