Reliability investigations in micromechanical devices

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Metadaten
Author:Ulrich MeschederORCiDGND, Wolfgang Kronast, N. Naychuk
DOI:https://doi.org/10.1016/j.sna.2003.10.054
ISSN:0924-4247
Parent Title (English):Sensors and Actuators A: Physical
Document Type:Article (peer-reviewed)
Language:English
Year of Completion:2004
Release Date:2018/02/22
Tag:Fatigue and crack propagation in crystalline silicon; Lifetime; Reliability
Volume:110.2004
Issue:1-3
First Page:150
Last Page:156
Open Access:Frei verf├╝gbar
Licence (German):License LogoEs gilt das UrhG