Estimation of elasticity modulus and fracture strength of thin perforated SiN membranes with finite element simulations

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Metadaten
Author:Adam Kovacs, Andras Kovacs, Ulrich MeschederORCiDGND
DOI:https://doi.org/10.1016/j.commatsci.2007.07.023
ISSN:0927-0256
Parent Title (English):Computational Materials Science
Document Type:Article (peer-reviewed)
Language:English
Year of Completion:2008
Release Date:2018/02/19
Tag:Critical pressure; Microsieve; Silicon-nitride membrane
Volume:43.2008
Issue:1
First Page:59
Last Page:64
Open Access:Innerhalb der Hochschule
Licence (German):License LogoEs gilt das UrhG