Stressuntersuchung und Optimierung von SOI basierten Membranen

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Metadaten
Author:Wolfgang Kronast, Ulrich MeschederORCiDGND, Rolf Huster
ISBN:978-3-8007-3183-1
Parent Title (German):MikroSystemTechnik - KONGRESS 2009: 12.10.2009 - 14.10.2009 in Berlin, Germany
Publisher:VDE-Verlag
Place of publication:Berlin
Document Type:Conference Proceeding
Language:German
Year of Completion:2009
Release Date:2018/02/19
Tag:CD-ROM
Pagenumber:4
Open Access:Frei verf├╝gbar
Licence (German):License LogoEs gilt das UrhG