Contact Mechanics and Needle Like Surfaces for Micro-Nano Integration

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Author:Shervin KeshavarziORCiD, Ulrich MeschederORCiDGND, Holger Reinecke, Andras Kovacs
URL:https://www.tu-ilmenau.de/fileadmin/media/mme2012/Proceedings/Session_D/D15_1692_MME2012_120703.pdf
Parent Title (English):23rd Micromechanics and Microsystems Europe Workshop: MME 2012, September 9 - 12, Ilmenau, Germany
Document Type:Conference Proceeding
Language:English
Year of Completion:2012
Release Date:2018/01/29
Open Access:Frei verf├╝gbar
Licence (German):License LogoEs gilt das UrhG