Finite-Elements Simulation of Etch Front Propagation in Silicon Electropolishing Process

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Metadaten
Author:Alexey Ivanov, Ulrich MeschederORCiDGND, Peter Woias
URL:http://ma.ecsdl.org/content/MA2013-02/42/2463.full.pdf+html
ISSN:1938-6737
Parent Title (English):ECS Transactions
Document Type:Contribution to a Periodical
Language:English
Year of Completion:2014
Release Date:2018/01/23
Volume:58.2014
Issue:46
First Page:15
Last Page:24
Open Access:Frei verf├╝gbar
Licence (German):License LogoEs gilt das UrhG