Development of a focusing micromirror device with an in-plane stress relief structure in silicon-on-insulator technology

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Author:Wolfgang Kronast, Ulrich MeschederORCiDGND, Bernhard Müller, Rolf Huster
DOI:https://doi.org/10.1117/1.JMM.13.1.011112
ISSN:1932-5134
Parent Title (English):Journal of Micro/Nanolithography, MEMS, and MOEMS
Document Type:Article (peer-reviewed)
Language:English
Year of Completion:2014
Release Date:2018/01/23
Volume:13.2014
Issue:1
Open Access:Frei verfügbar
Licence (German):License LogoEs gilt das UrhG