Investigation of plastic electrode tools for electrochemical machining of silicon

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Author:Victor V. Lyubimov, Vladimir M. Volgin, Ulrich MeschederORCiDGND, Inna V. Gnidina, Alexey Ivanov
DOI:https://doi.org/10.1016/j.precisioneng.2016.09.017
ISSN:1873-2372
Parent Title (English):Precision Engineering
Document Type:Article (peer-reviewed)
Language:English
Year of Completion:2016
Release Date:2017/04/26
Tag:Metal coating; Micro electrochemical machining; Plastic electrode-tool; Silicon
Volume:47.2016
First Page:546
Last Page:556
Open Access:Frei verf├╝gbar
Licence (German):License LogoEs gilt das UrhG