Investigation of green femtosecond laser ablation of silicon nitride for different laser fluences and pulse spacing
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| Document Type: | Article (peer-reviewed) |
|---|---|
| Author: | Esmaeil Ghadiri Zahrani, Amirmohammad Fakharzadeh Jahromi, Bahman AzarhoushangORCiDGND |
| URN: | https://urn:nbn:de:bsz:fn1-opus4-134049 |
| DOI: | https://doi.org/10.1016/j.oceram.2026.100909 |
| ISSN: | 2666-5395 |
| Parent Title (English): | Open Ceramics |
| Language: | English |
| Year of Completion: | 2026 |
| Release Date: | 2026/06/16 |
| Tag: | Green femtosecond laser; Pulse spacing; Si3N4; Surface ablation |
| Volume: | 25.2026 |
| Issue: | March |
| Article Number: | 100909 |
| Page Number: | 4 |
| Open-Access-Status: | Open Access |
| Gold | |
| Licence (German): |  Creative Commons - CC BY - Namensnennung 4.0 International |