Study of Scanning Parameters and Variable Focal Adjustment in Multi-Layer Laser Ablation of Silicon Nitride
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| Document Type: | Article (peer-reviewed) |
|---|---|
| Author: | Esmaeil Ghadiri Zahrani, Amirmohammad Fakharzadeh Jahromi, Bahman AzarhoushangORCiDGND |
| URN: | https://urn:nbn:de:bsz:fn1-opus4-132966 |
| DOI: | https://doi.org/10.1007/s12541-026-01446-3 |
| ISSN: | 2005-4602 |
| Parent Title (English): | International Journal of Precision Engineering and Manufacturing |
| Language: | English |
| Year of Completion: | 2026 |
| Release Date: | 2026/06/03 |
| Tag: | Femtosecond laser; Focal adjustment; Multi-layer ablation; Silicon nitride ceramic |
| Issue: | Online First |
| Page Number: | 11 |
| Open-Access-Status: | Open Access |
| Hybrid | |
| Licence (German): |  Creative Commons - CC BY - Namensnennung 4.0 International |