Primary Current Distribution Model for Electrochemical Etching of Silicon Through a Circular Opening

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Metadaten
Author:Alexey Ivanov, Ulrich MeschederORCiDGND
URL:https://www.comsol.com/paper/download/288181/ivanov_paper.pdf
ISBN:978-0-9910001-2-8
Parent Title (English):Proceedings of the 2015 COMSOL Conference, Grenoble
Document Type:Conference Proceeding
Language:English
Year of Completion:2015
Release Date:2017/01/12
Tag:Anodization; Electrochemical etching; Etch front movement; Silicon; Structuring
Pagenumber:7
Open Access:Frei verf├╝gbar
Licence (German):License LogoEs gilt das UrhG