Corner rounding of sharp silicon punching tool edges by local oxidation of silicon

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Metadaten
Author:Ulrich MeschederORCiDGND, Isman KhaziORCiD
DOI:https://doi.org/10.1016/j.mee.2015.02.033
ISSN:0167-9317
Parent Title (English):Microelectronic Engineering
Document Type:Article (peer-reviewed)
Language:English
Year of Completion:2015
Release Date:2016/11/15
Tag:3D transformation; Bird’s beak; Convex and concave corner rounding; Locos; Micropunching; Silicon punch tool
Volume:141.2015
Issue:2
First Page:178
Last Page:183
Open Access:Innerhalb der Hochschule
Licence (German):License LogoEs gilt das UrhG