TY  - JOUR
A1  - Fürjes, P.
A1  - Kovacs, Andras
A1  - Dücsö, Cs.
A1  - Adam, Maria
A1  - Müller, Bernhard
A1  - Mescheder, Ulrich
T1  - Porous silicon-based humidity sensor with interdigital electrodes and internal heaters
JF  - Sensors and Actuators B: Chemical
KW  - Humidity sensor
KW  - Porous silicon
KW  - Effective heating
Y1  - 2003
U6  - http://dx.doi.org/10.1016/S0925-4005(03)00423-4
SN  - 0925-4005
VL  - 95.2003
IS  - 1-3
SP  - 140
EP  - 144
ER  -