@article{KeshavarziMeschederReinecke2017,
  author    = {Keshavarzi, Shervin and Mescheder, Ulrich and Reinecke, Holger},
  title     = {Effect of Capillary Forces in Room Temperature Si-Si Direct Bonding Technique Using Velcrolike Surfaces},
  series = {Journal of Microelectromechanical Systems},
  volume    = {26.2017},
  journal   = {Journal of Microelectromechanical Systems},
  number    = {2},
  issn      = {1057-7157},
  doi       = {10.1109/JMEMS.2016.2646759},
  pages     = {385 -- 395},
  year      = {2017},
  language  = {en}
}
@article{KeshavarziMeschederReinecke2016,
  author    = {Keshavarzi, Shervin and Mescheder, Ulrich and Reinecke, Holger},
  title     = {Room Temperature Si-Si Direct Bonding Technique Using Velcro-Like Surfaces},
  series = {Journal of Microelectromechanical Systems},
  volume    = {25.2016},
  journal   = {Journal of Microelectromechanical Systems},
  number    = {2},
  issn      = {1941-0158},
  doi       = {10.1109/JMEMS.2016.2519823},
  pages     = {371 -- 379},
  year      = {2016},
  language  = {en}
}