@article{IvanovKovacsMescheder2016, author = {Ivanov, Alexey and Kovacs, Andras and Mescheder, Ulrich}, title = {Application of local backside contacts for structuring Of silicon with anodization: simulation and experiments}, series = {Procedia Engineering}, volume = {168.2016}, issn = {1877-7058}, doi = {10.1016/j.proeng.2016.11.399}, pages = {1180 -- 1183}, year = {2016}, language = {en} }