@inproceedings{SittkusMescheder2023, author = {Sittkus, Benjamin and Mescheder, Ulrich}, title = {In-situ SEM analysis tool for stretchable metal-elastomer-laminate-membranes for flexible sensors}, booktitle = {MikroSystemTechnik Kongress 2023, 23. - 25. Oktober 2023, Dresden, Germany}, year = {2023}, language = {en} }