TY - JOUR U1 - Wissenschaftlicher Artikel A1 - Kintzel, Wolfram A1 - Schmid, Marvin A1 - Rentschler, Achim A1 - Eisenlohr, Jörg A1 - Bucher, Volker T1 - Novel method for plasma etching of printed circuit boards as alternative for fluorocarbon gases JF - International Journal of Plasma Environmental Science and Technology : ISNTPT KW - Printed circuit board KW - Plasma etching KW - Fluorocarbon KW - PCB KW - HFC Y1 - 2023 SN - 2435-0125 SS - 2435-0125 U6 - https://doi.org/10.34343/ijpest.2023.17.e02002 DO - https://doi.org/10.34343/ijpest.2023.17.e02002 VL - 17.2023 IS - 2 SP - 19 S1 - 19 ER -