@article{KintzelSchmidRentschleretal.2023,
  author    = {Kintzel, Wolfram and Schmid, Marvin and Rentschler, Achim and Eisenlohr, J{\"o}rg and Bucher, Volker},
  title     = {Novel method for plasma etching of printed circuit boards as alternative for fluorocarbon gases},
  journal   = {International Journal of Plasma Environmental Science and Technology : ISNTPT},
  volume    = {17.2023},
  number    = {2},
  issn      = {2435-0125},
  doi       = {10.34343/ijpest.2023.17.e02002},
  pages     = {e02002},
  year      = {2023},
  language  = {en}
}