@article{PasslackSimonBucheretal.2023, author = {Passlack, Ulrike and Simon, Nicolai and Bucher, Volker and Harendt, Christine and Stieglitz, Thomas and Burghartz, Joachim N.}, title = {Flexible Ultrathin Chip-Film Patch for Electronic Component Integration and Encapsulation using Atomic Layer-Deposited Al2O3-TiO2 Nanolaminates}, journal = {ACS Applied Materials \& Interfaces}, volume = {15.2023}, number = {12}, issn = {1944-8252}, doi = {10.1021/acsami.2c22513}, pages = {16221 -- 16231}, year = {2023}, language = {en} }