TY - JOUR U1 - Wissenschaftlicher Artikel A1 - Ahmed, Minhaz A1 - Dankwort, Torben A1 - Grünzig, Sven A1 - Lange, Volker A1 - Gojdka, Björn T1 - Broadband Zero-Power Wakeup MEMS Device for Energy-Efficient Sensor Nodes JF - Micromachines KW - Zero-power wakeup KW - Lossless standby KW - Piezoelectric MEMS energy harvesting KW - Wafer-level-integrated micromagnets KW - Wireless sensor nodes WSN Y1 - 2022 UN - https://nbn-resolving.org/urn:nbn:de:bsz:fn1-opus4-89762 SN - 2072-666X SS - 2072-666X U6 - https://doi.org/10.3390/mi13030407 DO - https://doi.org/10.3390/mi13030407 VL - 13.2022 IS - 3 SP - 13 S1 - 13 ER -