@inproceedings{SimonPasslackStieglitzetal.2021,
  author    = {Nicolai Simon and Ulrike Passlack and Thomas Stieglitz and Felix Blendinger and Volker Bucher},
  title     = {Qualification of the Barrier Properties of ALD-coated Polymer Films with Humidity Sensors},
  series = {MikroSystemTechnik Kongress 2021, 08. - 10. November 2021, Stuttgart-Ludwigsburg, Germany},
  publisher = {VDE Verlag},
  address   = {Berlin},
  isbn      = {978-3-8007-5656-8},
  pages     = {380 -- 383},
  year      = {2021},
  language  = {en}
}