TY - CHAP U1 - Konferenzveröffentlichung A1 - Khazi, Isman M. A1 - Kovacs, Andras A1 - Mescheder, Ulrich T1 - Inductive Transducers with 2D Microcoils in Reflection Differential Transmitter-Receiver Mode for the Micro Non-Destructive Testing of Grinding Burn T2 - The 21st International Conference on Solid-State Sensors, Actuators and Microsystems, Transducers 2021, 20 - 25 June 2021, online virtual conference N2 - Microfabricated 2D inductive eddy-current transducers operating in a reflection differential transmitter-receiver mode are presented for the micro nondestructive detection of micro grinding burn. 2D spiral circular microcoils are employed as excitation coils, while an innovatively conceptualized “interconnected split-D” type differential microcoil is used as a sensing coil. Finite element modelling using COMSOL revealed the efficacy of proposed concept in non-destructive testing of small grinding burn having a width of 100 µm. The induced sensing coil voltage changed as a function of presence of grinding burn, with successful recording of the signal for the investigated lift-off range of 250 µm - 1000 µm for 100 kHz to 1 MHz driving frequencies of excitation coil. Experimental validation showed a 94% increase in the induced voltage of the sensing coil in presence of grinding burn on increasing the driving frequency of excitation coil from 100 kHz to 1 MHz. Thereby, revealing the superficial nature of the grinding burn defect, and showing the efficacy of the proposed concept for the non-destructive testing of grinding burn. KW - Eddy-current transducers KW - 2D differential microcoils KW - Micro non-destructive evaluation KW - Grinding burn Y1 - 2021 SN - 978-1-6654-1267-4 SB - 978-1-6654-1267-4 U6 - https://doi.org/10.1109/Transducers50396.2021.9495725 DO - https://doi.org/10.1109/Transducers50396.2021.9495725 SP - 1202 EP - 1205 ER -