@techreport{MeschederMuellerNimoetal.2013, author = {Ulrich Mescheder and Bernhard M{\"u}ller and Antwi Nimo and Awad S. Abou Elkeir}, title = {Energy Harvesting: Silizium-Chip zum Ernten von Energie aus Vibration}, year = {2013}, language = {de} }