@techreport{IvanovMeschederWoiasetal.2009,
  author    = {Alexey Ivanov and Ulrich Mescheder and Peter Woias and Michael Kr{\"o}ner},
  title     = {Formation of arbitrarily shaped 3D-forms in silicon by electrochemical wet-etching},
  series = {Forschungsbericht},
  year      = {2009},
  language  = {en}
}