TY  - RPRT
U1  - Forschungsbericht
A1  - Mescheder, Ulrich
A1  - Kovacs, Andras
A1  - Müller, Bernhard
T1  - Sensorik: Porous Silicon Based Humidity Sensor with Interdigital Electrodes and Internal Heaters
T2  - Forschungsbericht
Y2  - 2002
SP  - 32
EP  - 35
ER  -