@article{MeschederMundHuber1987,
  author    = {Ulrich Mescheder and F. Mund and H.-L. Huber},
  title     = {Linewidth metrology for x-ray masks with subhalfmicron feature size},
  series   = {Microelectronic Engineering},
  volume    = {06.1987},
  number    = {1-4},
  issn      = {0167-9317},
  doi       = {10.1016/0167-9317(87)90101-8},
  pages     = {653 -- 659},
  year      = {1987},
  language  = {en}
}