@techreport{KovacsStoffel1992,
  author    = {Kovacs, Andras and Stoffel, A.},
  title     = {Optimierung der Technologie und Herstellung von freitragenden Polysilizium-Membranen},
  series    = {Forschungsbericht},
  pages     = {30 -- 32},
  year      = {1992},
  language  = {de}
}