@article{BetzHuberPongratzetal.1986,
  author    = {H. Betz and H.-L. Huber and S. Pongratz and W. Rohrmoser and W. Windbracke and Ulrich Mescheder},
  title     = {Silicon X-ray masks: Pattern placement and overlay accuracy},
  series   = {Microelectronic Engineering},
  volume    = {05.1986},
  number    = {1-4},
  issn      = {0167-9317},
  doi       = {10.1016/0167-9317(86)90028-6},
  pages     = {41 -- 49},
  year      = {1986},
  language  = {en}
}