@article{LuethjeMackensMeschederetal.1986,
  author    = {H. L{\"u}thje and U. Mackens and Ulrich Mescheder and B. Matthie{\"s}en},
  title     = {Stability of SiC-masks for high resolution synchrotron X-ray lithography},
  series   = {Microelectronic Engineering},
  volume    = {05.1986},
  number    = {1-4},
  issn      = {0167-9317},
  doi       = {10.1016/0167-9317(86)90027-4},
  pages     = {39},
  year      = {1986},
  language  = {en}
}