@article{L{\"u}thjeMackensMeschederetal.1986,
  author    = {L{\"u}thje, H. and Mackens, U. and Mescheder, Ulrich and Matthießen, B.},
  title     = {Stability of SiC-masks for high resolution synchrotron X-ray lithography},
  journal   = {Microelectronic Engineering},
  volume    = {05.1986},
  number    = {1-4},
  issn      = {0167-9317},
  doi       = {10.1016/0167-9317(86)90027-4},
  year      = {1986},
  language  = {en}
}