@inproceedings{MackensL{\"u}thjeMeschederetal.1988,
  author    = {Mackens, U. and L{\"u}thje, H. and Mescheder, Ulrich and Mund, F. and Pongratz, S.},
  title     = {Application Of Sic-X-Ray Masks For Fabricating Sub-Micron Devices},
  booktitle = {Proceedings of SPIE: Volume 0923; Electron-Beam, X-Ray, and Ion Beam Technology: Submicrometer Lithographies VII},
  isbn      = {9780892529582},
  pages     = {7},
  year      = {1988},
  language  = {en}
}