@inproceedings{MeschederWerner1989, author = {Mescheder, Ulrich and Werner, K.}, title = {Submikrometer Linienbreitenmetrologie hoher Genauigkeit}, booktitle = {Maskentechnik f{\"u}r Mikroelektronik-Bausteine: Tagungsbericht, M{\"u}nchen, 09. November 1989; VDI-Berichte, 795}, isbn = {3-18-090795-9}, pages = {155 -- 190}, year = {1989}, language = {de} }