TY  - JOUR
U1  - Zeitschriftenartikel, wissenschaftlich - begutachtet (reviewed)
A1  - Mackens, U.
A1  - Mescheder, Ulrich
A1  - Mund, F.
A1  - Lüthje, H.
A1  - Lifka, H.
A1  - Juffermans, C.A.H.
A1  - Woerlee, P.H.
A1  - Walker, A.J.
T1  - Fabrication of 0.5 μm NMOS-devices by all level X-ray lithography
JF  - Microelectronic Engineering
Y1  - 1989
SN  - 0167-9317
SS  - 0167-9317
U6  - https://doi.org/10.1016/0167-9317(89)90020-8
DO  - https://doi.org/10.1016/0167-9317(89)90020-8
VL  - 09.1989
IS  - 1-4
SP  - 89
EP  - 92
ER  -