@article{MackensMeschederMundetal.1989,
  author    = {Mackens, U. and Mescheder, Ulrich and Mund, F. and L{\"u}thje, H. and Lifka, H. and Juffermans, C.A.H. and Woerlee, P.H. and Walker, A.J.},
  title     = {Fabrication of 0.5 μm NMOS-devices by all level X-ray lithography},
  journal   = {Microelectronic Engineering},
  volume    = {09.1989},
  number    = {1-4},
  issn      = {0167-9317},
  doi       = {10.1016/0167-9317(89)90020-8},
  pages     = {89 -- 92},
  year      = {1989},
  language  = {en}
}