@article{SchafferMeschederWeigmannetal.1990,
  author    = {H. Schaffer and Ulrich Mescheder and U. Weigmann and H.-C. Petzold},
  title     = {Influence of X-ray mask repair on pattern placement accuracy},
  series   = {Microelectronic Engineering},
  volume    = {11.1990},
  number    = {1-4},
  issn      = {0167-9317},
  doi       = {10.1016/0167-9317(90)90108-6},
  pages     = {251 -- 254},
  year      = {1990},
  language  = {en}
}