TY  - CHAP
U1  - Konferenzveröffentlichung
A1  - Majer, S.
A1  - Mescheder, Ulrich
T1  - Simulation supported design of micromechanical sensors
T2  - Simulation and design of microsystems and microstructures : [papers presented at the First International Conference on the Simulation and Design of Microsystems and Microstructures, which was held in Southampton, UK, in September 1995
Y1  - 1995
SN  - 1-85312-390-0
SB  - 1-85312-390-0
SP  - 329
EP  - 337
PB  - Computational Mechanics Publ.
CY  - Southampton
ER  -