TY - JOUR U1 - Wissenschaftlicher Artikel A1 - Mescheder, Ulrich A1 - Majer, S. T1 - Micromechanical inclinometer JF - Sensors and Actuators A: Physical KW - Inclinometers KW - Micromechanics KW - Piezoresistance KW - Silicon Y1 - 1997 SN - 0924-4247 SS - 0924-4247 U6 - https://doi.org/10.1016/S0924-4247(97)01387-3 DO - https://doi.org/10.1016/S0924-4247(97)01387-3 VL - 60.1997 IS - 1-3 SP - 134 EP - 138 ER -